Digital imaging techniques part 2.5

Prof. Dr. Veerle Cnudde, UGent.

What does FIB-SEM means?

  1. Field induced beam-scanning electron microscopy
  2. Focused induced backscattered electrons - scanning electron microscopy
  3. Focused ion beam- scanning electron microscopy
  4. Focused ionized beam - scanning electron microscopy

COMBINED FIB–SEM TECHNIQUES: ADVANCED TOOLS TO RESOLVE MICROSTRUCTURES AND MINERALS PHASES IN SEDIMENTARY ROCKS

based on Richard Wirth and Luiz Morales

FIB the principle

FIB= focused ion beam

A FIB device basically resembles a SEM consisting of an ion source instead of an electron source, an ion column to focus and to scan the beam and a sample stage to position the target material

The interaction of the accelerated ions with the target material produces both backscattered and secondary electrons that can be detected with suitable electron detectors and used for imaging.

schematic: ion beam and sample interaction

FIB the principle

FIB can be used as a machining tool to sputter cavities with exact dimensions

FibSEM image example

At the beginning, FIB was operated as a single beam device.

FIB the principle

Next logical step: the combination of an ion column FIB with an electron column SEM creating a DualBeam™ machine FIB/SEM.

The assembly of FIB and SEM extended the utilization of such a device tremendously because it combines the capabilities of an SEM such as imaging, X-ray analysis and BSE with sputtering of material from the target.

FIB nanotomography, Slice&View 3D FIB/SEM, FIB Serial sectioning,…

FIB-nt: now possible to prepare a new surface normal to the sample surface => access to the third dimension of a sample.

schematic FIB function

FIB nanotomography / Slice&View

FIB-nt: now possible to prepare a new surface normal to the sample surface => access to the third dimension of a sample.

FibSEM image example2
FibSEM image example2

FIB nanotomography / Slice&View

The ion-polished front wall can be imaged and analyzed with EDS

Serial sectioning of the surface generates an image stack

=> 3D volume analysis

FibSEM image: functioning

Principle of a FIB/SEM DualBeam

Principle of a FIB/SEM DualBeam 1
Principle of a FIB/SEM DualBeam 2
a FIB/SEM DualBeam

FIB-nanotomography / slice&view

Resolution same as SEM

Spatial resolution in z-direction limited to +/- 10 nm

Very small volumes (less than 50 x 50 x 50 µm3) (usually less)

Sectioning and polishing is the time-consuming step

example: 100 nm slice thickness x 200 slices = 20 µm, Aquisition time = +3 hours

Cuboid size: 1.6 x 1.8 x 1.7 µm
Three-dimensional analysis of porousBaTiO3 ceramics using FIB nanotomography
Holzer et al.: Three-dimensional analysis of porousBaTiO3 ceramics using FIB nanotomography, 2004 Journal of Microscopy, Vol 216, pp. 84-95

FIB/SEM: Cross-Sectioning 3D Analysis

Principle of a FIB/SEM DualBeam 2

FIB/SEM applications

FIB/SEM applications

Drawbacks

Working with geological materials, there are some important disadvantages to the technique:

1. Representative volume?

Drawbacks

2. Unequal milling depth due to non-uniform material composition -> increased milling times

-> increased milling times

FIB/SEM example image

Drawbacks

3. Charge build-up due to non-conductive samples as no coating is possible between different image steps

-> low voltage, backscattered imaging

FIB/SEM example image2
FIB/SEM example image3

FIB-SEM @ugent

Intec

INTEC FIBSEM
INTEC FIBSEM close up

First experiments @UGent

Analysis of regions with clay minerals in 3D

To fill in the gaps that High Resolution CT cannot capture

1st ugent exp
1st ugent exp
1st ugent exp smoky thingy

First experiments @UGent

1st ugent exp: rotating image stack

Other applications of FIB/SEM

Preparation of micro-pilars for nano-tomography

schematic Preparation of micro-pilars for nano-tomography
steps Preparation of micro-pilars for nano-tomography
Preparation of micro-pilars for nano-tomography

Other applications of FIB/SEM

 slices for TEM  slices for TEM  slices for TEM
Preparation of slices for TEM
Chip repair (for research purposes)
Chip repair (for research purposes)

Linking X-ray and FIB-SEM tomographies

Linking X-ray and FIB-SEM tomographies

3D porosity - µCT

Resolution of X-ray computed µCT is not sufficient to describe connected pore space

Boom Clay (HADES)

Boom Clay (HADES)

Voxel size = 2.5 x 2.5 x 2.5 µm3

after Hemes et al. (2015)

Where are the pores ?

Dried Boom Clay – fractured surface
Dried Boom Clay – fractured surface

Surface preparation

Damages due to drying

Broad Ion Beam cross-sectioning

Porosity down to the state-of-the-art-SEM resolution

Porosity down to the state-of-the-art-SEM resolution

FIB-SEM tomography on selected ROI from large BIB image

FIB-SEM tomography on selected ROI from large BIB image

3D porosity – FIB-SEM

Connected pore space down to 20 nm pore throat is accessible with FIB-SEM

Boom Clay (HADES), Voxel size 20 x 20 x 20 nm3

Dried Boom Clay – fractured surface
after Hemes et al. (2015)
Dried Boom Clay – fractured surface
after Hemes et al. (2015)

Pore cross section area sizes distribution from images

Pore-area sizes  distribution in 2D representative cross-sections are power law distributed over 6-7 orders of magnitude
Pore-area sizes distribution in 2D representative cross-sections are power law distributed over 6-7 orders of magnitude

3D-FIB-SEM characterization of representative islands

3D-FIB-SEM characterization of representative islands

Focused Ion Beam (FIB)-TEM: Exploring Earth Materials with ions and electrons.

Richard Wirth

Helmholtz Centre Potsdam

GFZ German Research Centre for Geosciences

How to explore the Geosciences “Nano-world”?

Diamonds

clear diamond
what a jeweler wants
diamond with inclusions
what a geologist wants

Focused Ion Beam (FIB): site-specific TEM sample preparation

FIB systems operated at GFZ Potsdam

clear diamond
FEI FIB 200 TEM
diamond with inclusions

FEI Quanta 3D

image courtesy of Anja Schreiber, GFZ, Potsdam

Focused Ion Beam (FIB): site-specific TEM sample preparation

Ex-situ lift-out technique

Ex-situ lift-out technique
Ex-situ lift-out technique
Ex-situ lift-out technique

TEM Micro- and Nanoanalysis

TEM Micro- and Nanoanalysis examples of results

FIB/TEM Applications in Geosciences

Meteorites

Meteorite falling Chelyabinsk, Russia

Meteorite Chelyabinsk, Russia (15-2-2013)

No fragments > 20 cm have been found

FIB/TEM Applications in Geosciences

Meteorites: Microstructure

Meteorite Chelyabinsk 15. 2. 2013 (small fragment), SE image

Ordinary chondrite originating from small asteroidal bodies within the Asteriod belt.

Meteorite Chelyabinsk 15. 2. 2013 (small fragment), SE image

FIB/TEM Applications in Geosciences

Meteorites: Microstructure “barred olivine”

BSE image: Meteorite Chelyabinsk
BSE image: Meteorite Chelyabinsk

FIB/TEM Applications in Geosciences

Meteorites: Microstructure “shock-induced melt vein”

BSE image: Meteorite Chelyabinsk 15. 2. 2013 (small fragment)
BSE image: Meteorite Chelyabinsk 15. 2. 2013 (small fragment)

FIB/TEM Applications in Geosciences

Meteorites: Microstructure “Phase analysis” in melt veins

HAADF image and TEM BF image
HAADF image and TEM BF image

FIB/TEM Applications in Geosciences

Meteorites: Microstructure “Phase analysis” in melt veins

TEM bright-field image and lattice fringe image
TEM bright-field image

Nanoinclusions in diamond from the lower Transition Zone

Inclusion in diamond (Juina, Brazil)

Inclusions of “Phase Egg” (AlSiO3 (OH) + fluid (porosity) + nanocrystals of stishovite

Inclusions of “Phase Egg” (AlSiO3 (OH) + fluid (porosity) + nanocrystals of stishovite
Wirth, Vollmer, Brenker, F, Matsyuk, Kaminsky (2007) EPSL, 259, 3-4, 384-399.

Nanoinclusions in diamond from the upper mantle

Inclusions in microdiamond, Samotkan Placer, Ukraine

Inclusions in microdiamond, Samotkan Placer,  Ukraine

Olivine + orthopyroxene inclusions in diamond suggest peridotitic origin

Kvasnytsya, V. M.; Wirth, R. (2009), Lithos, 113, 3-4, 454-464.

Nanoinclusions in diamond from the upper mantle

Inclusions of “Phase Egg” (AlSiO3 (OH) + fluid (porosity) + nanocrystals of stishovite
Logvinova, Wirth, Fedorova, Sobolev, (2008) European Journal of Mineralogy, 20, 3, 317-331.

FIB/TEM Applications in Geosciences

Partially open grain boundaries in Carrara marble: 3D imaging

Partially open grain boundaries in Carrara marble: 3D imaging
Michelangelo : David

FIB/TEM Applications in Geosciences

Partially open grain boundaries in Carrara marble

Implications of partially open grain boundaries:

FIB/TEM Applications in Geosciences

TEM element mapping after using the foil for STXM and XANES

Constant foil thickness allows element mapping with TEM
Bernard, S.; Horsfield, B.; Schulz, H.-M.; Schreiber, A.; Wirth, R.; Vu, T. T.; Perssen, F.; Kitzer, S.; Volk, H.; Sherwood, N.; Fuentes, D. (2010). Chemie der Erde – Geochemistry, 70, Suppl. 3, 119-133.

FIB/TEM Applications in Geosciences

Geobiology: Deep sea sponge monorhaphis chuni

Deep sea sponge monorhaphis chuni cross section and whole

FIB/TEM Applications in Geosciences

Geobiology: Deep sea sponge monorhaphis chuni

Deep sea sponge monorhaphis chuni Natural fibre composite

FIB/TEM Applications in Geosciences

Geobiology: Fossil Acritarch

Fossil Acritarch cell walls from 650 my old Chichkan Formation, Kazakhstan

Fossil Acritarch  cell walls  from 650 my old Chichkan Formation, Kazakhstan
Kempe, A.; Wirth, R.; Altermann, W.; Stark, R. W.; Schopf, J. W.; Heckl, W. M. (2005): Focussed ion beam preparation and in situ nanoscopic study of Precambrian acritarchs. Precambrian Research, 140, 1-2, 36-54.

FIB/TEM Applications in Geosciences

Geobiology: Precambrian Acrtitarch

Deep sea sponge monorhaphis chuni Natural fibre composite
Kempe, A.; Wirth, R.; Altermann, W.; Stark, R. W.; Schopf, J. W.; Heckl, W. M. (2005): Focussed ion beam preparation and in situ nanoscopic study of Precambrian acritarchs. Precambrian Research, 140, 1-2, 36-54.

FIB/TEM Applications in Geosciences

Sedimentary rocks: porosity

Ultracataclastic core samples recovered from 3194 m and 3294 m depth of the main bore hole of the San Andreas Fault Observatory at Depth (SAFOD).

Deep sea sponge monorhaphis chuni Natural fibre composite
Janssen, C.; Wirth, R.; Rybacki, E.; Naumann, R.; Kemnitz, H.; Wenk, H.-R.; Dresen, G. (2010): Amorphous material in SAFOD core samples (San Andreas Fault): Evidence for crush-origin pseudotachylytes?. Geophysical Research Letters, 37, L01303

Summary